MEMS device with simplified electrical conducting paths
US8754529B2 · kind B2 · utility
1Cited by
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12Claims
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Assignee
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Key dates
| Filing date | Feb 21, 2012 |
| Grant date | Jun 17, 2014 |
| Priority date | — |
| Expiry date | Feb 21, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A MEMS device comprises a substrate for manufacturing a moving MEMS component is divided into two electrically isolated conducting regions to allow the moving MEMS component and a circuit disposed on its surface to connect electrically with another substrate below respectively through their corresponding conducting regions, thereby the electrical conducting paths and manufacturing process can be simplified.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.