Microelectromechanical system (MEMS) device, method of operating the same, and method of forming the same
US8755106B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2009 |
| Grant date | Jun 17, 2014 |
| Priority date | — |
| Expiry date | Jan 14, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/4236
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microelectromechanical system (MEMS) device, method of operating the MEMS device, and a method of forming the MEMS device are provided. The MEMS device includes a positioning mechanism and a locking mechanism. The positioning mechanism includes a first arm structure having a first surface and a second surface; a second arm structure having a first surface and a second surface; wherein the first surface of the first arm structure faces the first surface of the second arm structure. The positioning mechanism also includes a first actuator disposed adjacent to the second surface of the first arm structure facing away from the second arm structure; and a second actuator disposed adjacent to the second surface of the second arm structure facing away from the first arm structure. The locking mechanism includes a first pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the first arm structure between the first and second surfaces of the first arm structure; and a second pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the second arm structure between the first and seco…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.