Coplanar waveguide structures with alternating wide and narrow portions having different thicknesses, method of manufacture and design structure
US8760245B2 · kind B2 · utility
2Cited by
11References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 3, 2010 |
| Grant date | Jun 24, 2014 |
| Priority date | — |
| Expiry date | Nov 21, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P9/00
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
On-chip high performance slow-wave coplanar waveguide structures, method of manufacture and design structures for integrated circuits are provided herein. The structure includes at least one ground and signal layer provided in a same plane as the at least one ground. The signal layer has at least one alternating wide portion and narrow portion with an alternating thickness. The wide portion extends toward the at least one ground.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.