Microcantilever-based gas sensor employing two simultaneous physical sensing modes
US8762075B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 6, 2010 |
| Grant date | Jun 24, 2014 |
| Priority date | — |
| Expiry date | Jun 24, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0215
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to one embodiment, a system for detecting and identifying gases includes a piezoresistive microcantilever transducer, wherein dissipation of heat from the piezoresistive microcantilever into one or more gases is measured by changes in an electrical resistance of the piezoresistor, a vibrating microcantilever transducer, wherein shifts are measured in resonant frequency of the vibrating microcantilever due to viscous damping thereof by the one or more gases, and a subsystem for correlating the measured resistance changes and the resonant frequency shifts to the one or more gases. In another embodiment, a method for detecting and identifying one or more gases includes determining dissipation of heat from a microcantilever into one or more gases, and determining shifts in resonant frequency of the microcantilever due to viscous damping thereof by the one or more gases. Other systems, methods, and computer program products are also described according to more embodiments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.