Thermal air flow sensor
US8763452B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 15, 2011 |
| Grant date | Jul 1, 2014 |
| Priority date | — |
| Expiry date | May 20, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/105
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a thermal air flow sensor according to the invention, a hollow formed in a detecting element is communicated with a circuit chamber, in which driving circuit parts of the detecting element are mounted, or an intake duct exterior. Thereby, pressure in the hollow balances with pressure on the outside. Also, since the circuit chamber is provided to be isolated from a detection chamber, in which a detecting part of the detecting element is arranged, that is, a passage chamber, through which air being a measuring object flows, air flowing in the passage chamber can be restrained from flowing into the hollow to have an influence on flow output characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.