Patent · US Active

Pressure sensor with an interferometric sensor and an in-fiber bragg grating reference sensor

US8764678B2 · kind B2 · utility

7Cited by
4References
9Claims
0Family size

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Key dates

Filing dateJan 31, 2011
Grant dateJul 1, 2014
Priority date
Expiry dateAug 16, 2032

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49194
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A pressure sensor (10 for medical applications comprises a silica optical fiber extrinsic Fabry-Perot interferometric (EFPI) pressure sensor (2) and an in-fiber Bragg grating (FBG, 3). The cavity of the EFPI pressure sensor (2) is formed by the end face of the FBG (3), a glass capillary (5) and a glass diaphragm (6). The glass diaphragm (6) is secured in place by a fusion splice (7) and the glass capillary (5) by a fusion splice (8). As illustrated, incident light is directed into the FBG 3 and there are reflections in the EFPI pressure sensor (2). Applied pressure causes a deflection of the glass diaphragm (6) and hence modulation of the EFPI sensor (2) cavity. The FBG (3) is used as a reference sensor to eliminate temperature cross-sensitivity of the EFPI pressure sensor (2). The EFPI cavity was fabricated using a 200 μm silica glass fiber, a 133/220 μm (inner/outer diameter) silica glass capillary and a standard telecommunication FBG. Initially, the end faces of the 200 μm silica glass fiber and the silica glass capillary were polished and both planar surfaces were spliced together using a fusion splicer. Then the silica glass capillary was cleaved 5 mm away form the capillary/2…

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