Pressure sensor with an interferometric sensor and an in-fiber bragg grating reference sensor
US8764678B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2011 |
| Grant date | Jul 1, 2014 |
| Priority date | — |
| Expiry date | Aug 16, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49194
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor (10 for medical applications comprises a silica optical fiber extrinsic Fabry-Perot interferometric (EFPI) pressure sensor (2) and an in-fiber Bragg grating (FBG, 3). The cavity of the EFPI pressure sensor (2) is formed by the end face of the FBG (3), a glass capillary (5) and a glass diaphragm (6). The glass diaphragm (6) is secured in place by a fusion splice (7) and the glass capillary (5) by a fusion splice (8). As illustrated, incident light is directed into the FBG 3 and there are reflections in the EFPI pressure sensor (2). Applied pressure causes a deflection of the glass diaphragm (6) and hence modulation of the EFPI sensor (2) cavity. The FBG (3) is used as a reference sensor to eliminate temperature cross-sensitivity of the EFPI pressure sensor (2). The EFPI cavity was fabricated using a 200 μm silica glass fiber, a 133/220 μm (inner/outer diameter) silica glass capillary and a standard telecommunication FBG. Initially, the end faces of the 200 μm silica glass fiber and the silica glass capillary were polished and both planar surfaces were spliced together using a fusion splicer. Then the silica glass capillary was cleaved 5 mm away form the capillary/2…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.