Coplanar waveguide structures with alternating wide and narrow portions, method of manufacture and design structure
US8766747B2 · kind B2 · utility
1Cited by
12References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 1, 2010 |
| Grant date | Jul 1, 2014 |
| Priority date | — |
| Expiry date | Apr 29, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P9/00
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
On-chip high performance slow-wave coplanar waveguide structures, method of manufacture and design structures for integrated circuits are provided herein. The structure includes at least one ground and a signal layer provided in a same plane as the at least one ground. The signal layer has at least one alternating wide portion and narrow portion. The wide portion extends toward the at least one ground.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.