Patent · US Active

Method of measuring micro- and nano-scale properties

US8770050B2 · kind B2 · utility

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2Claims
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Inventor

Key dates

Filing dateMar 17, 2006
Grant dateJul 8, 2014
Priority date—
Expiry dateJun 19, 2030

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B2201/033
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

This invention is a novel methodology for precision metrology, sensing, and actuation at the micro- and nano-scale. It is well-suited for micro- and nano-scale because it leverages off the electromechanical benefits of the scale. The invention makes use of electrical measurands of micro- or nano-scale devices to measure and characterize themselves, other devices, and whatever the devices subsequently interact with. By electronically measuring the change in capacitance, change in voltage, and/or resonance frequency of one or more test structures, a multitude of geometric, dynamic, and material properties may be extracted with a much higher accuracy and precision than conventional methods.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.