Low flow injector to deliver a low flow of gas to a remote location
US8770215B1 · kind B1 · utility
16Cited by
7References
18Claims
0Family size
Inventors
Key dates
| Filing date | Jul 20, 2012 |
| Grant date | Jul 8, 2014 |
| Priority date | — |
| Expiry date | Jan 20, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87692
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A low flow injector controls remote delivery of low flows of gas. A higher flow carrier gas is provided by an MFC to a conduit. A remote flow restrictor is located to exhaust a critical process gas directly into the conduit. An electronic regulator controls a pressure of the critical gas responsive to a pressure point received from a controller corresponding to a desired mass flow. Also, a large flow restrictor vents the critical process gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.