PZT microactuator for disk drive suspension having electrical via and wrap-around electrode
US8773820B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2014 |
| Grant date | Jul 8, 2014 |
| Priority date | — |
| Expiry date | Feb 17, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/4873
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A PZT microactuator for a disk drive suspension has a first electrode on a majority of its top surface, a second electrode on a majority of its bottom surface, the first electrode extending to a small portion of the bottom surface through a via filled with a conductive material such as conductive epoxy. The microactuator may be cut near the via during manufacturing in order to separate it from the bulk PZT material. Alternatively, the microactuator may be cut through the via in which case the via becomes a conductive column at the side edge of the microactuator. The conductive column may be coated with an encapsulant in order to prevent particle shed from the cut material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.