Ozone gas supply system
US8778274B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 6, 2010 |
| Grant date | Jul 15, 2014 |
| Priority date | — |
| Expiry date | Oct 23, 2030 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B2201/90
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An ozone gas output flow rate management unit configured to receive a plurality of ozone gas outputs from a plurality of ozone generation units and capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses by performing an opening/closing operation of a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.