Pellicle and a method for making the same
US8778569B2 · kind B2 · utility
0Cited by
3References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 7, 2010 |
| Grant date | Jul 15, 2014 |
| Priority date | — |
| Expiry date | Apr 6, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/64
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
There is provided a pellicle having a pellicle frame on which an adhesive layer for attaching the pellicle onto a photo mask is made from a room temperature curable two-part adhesive, so that a formation of the adhesive layer is carried out without heating. The room temperature curable two-part adhesive dispensed on the pellicle frame is not heated for curing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.