Patent · US Active

Integrated circuit including a porous material for retaining a liquid and manufacturing method thereof

US8779548B2 · kind B2 · utility

7Cited by
3References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 26, 2010
Grant dateJul 15, 2014
Priority date
Expiry dateMay 18, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3011
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Disclosed is an integrated circuit (IC) comprising a substrate (10) including a plurality of circuit elements and a metallization stack (20) covering said substrate for providing interconnections between the circuit elements, wherein the top metallization layer of said stack carries a plurality of metal portions (30) embedded in an exposed porous material (40) for retaining a liquid, said porous material laterally separating said plurality of metal portions. An electronic device comprising such an IC and a method of manufacturing such an IC are also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.