Integrated circuit including a porous material for retaining a liquid and manufacturing method thereof
US8779548B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 26, 2010 |
| Grant date | Jul 15, 2014 |
| Priority date | — |
| Expiry date | May 18, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3011
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is an integrated circuit (IC) comprising a substrate (10) including a plurality of circuit elements and a metallization stack (20) covering said substrate for providing interconnections between the circuit elements, wherein the top metallization layer of said stack carries a plurality of metal portions (30) embedded in an exposed porous material (40) for retaining a liquid, said porous material laterally separating said plurality of metal portions. An electronic device comprising such an IC and a method of manufacturing such an IC are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.