Method for producing magnetoresistive effect element, magnetic sensor, rotation-angle detection device
US8779764B2 · kind B2 · utility
14Cited by
6References
9Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 13, 2010 |
| Grant date | Jul 15, 2014 |
| Priority date | — |
| Expiry date | Jul 10, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N50/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
To provide a method which can define the direction and orientation of magnetization of a pinned layer while reducing the number of steps of forming a GMR film. The magnetization direction of the pinned layer is defined in a plurality of directions by forming a plurality of patterns having directivities. Further, when the magneto-resistive effect film is formed, a magnetic field is applied in a direction at an angle set between the angles of the plurality of patterns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.