Method for manufacturing anodized alumina, and device and method for inspecting the same
US8780350B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 25, 2012 |
| Grant date | Jul 15, 2014 |
| Priority date | — |
| Expiry date | Sep 25, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95692
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a method of manufacturing an article having a fine concave-convex structure on a surface thereof, the structure having pores in which a pore interval is less than or equal to a wavelength of visible light, including: irradiating a surface of the article having the fine concave-convex structure on the surface, with light from an illumination device; capturing an image of reflected light from the surface of the article having the fine concave-convex structure on the surface using imaging device; acquiring color information from an image captured by the imaging device; and inspecting the article having the fine concave-convex structure based on the color information. According to the present invention, it is possible to easily inspect the depth of the pores of anodized alumina and the pitch between the pores, and to provide a method of manufacturing anodized alumina having a stable pore shape.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.