Patent · US Active

Process for producing a quartz glass cylinder and also support for carrying out the process

US8783069B2 · kind B2 · utility

2Cited by

6References

7Claims

0Family size

Assignee

HERAEUS QUARZGLAS GMBH & CO. KG · DE

Inventors

Anke Schuster · Bodenwerder, DE
Rene Sowa · Bitterfeld-Wolfen, DE
Martin Trommer · Bitterfeld-Wolfen, DE
Udo Peper · Bodenwerder, DE

Key dates

Filing date	Sep 14, 2010
Grant date	Jul 22, 2014
Priority date	—
Expiry date	Mar 21, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/2918
WIPO fieldOther special machines
WIPO sectorMechanical engineering

Abstract

In a known process for producing a quartz glass cylinder, a porous soot tube, which is sintered to form the quartz glass cylinder, is produced by depositing SiO2 particles on an outer cylindrical surface of a support, which rotates about the longitudinal axis thereof and has a layer of silicon carbide (SiC layer). In order on this basis to specify a support having a high resistance to fracture, which firstly can easily be removed and which secondly presents a low risk of contamination for the soot body, the invention proposes that the SiC layer is treated at a high temperature in an oxygen-containing atmosphere before the SiO2 particles are deposited, in such a manner that an SiO2 protective layer having a thickness of at least 0.1 μm is produced by oxidation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.