Micromachined force-balance feedback accelerometer with optical displacement detection
US8783106B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 13, 2011 |
| Grant date | Jul 22, 2014 |
| Priority date | — |
| Expiry date | Aug 30, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/093
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.