Patent · US Active

MEMS dynamic pressure sensor, in particular for applications to microphone production

US8783113B2 · kind B2 · utility

13Cited by
2References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 20, 2011
Grant dateJul 22, 2014
Priority date—
Expiry dateApr 13, 2032

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B2203/051
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

A pressure sensor of the MEMS and/or NEMS type is disclosed, including:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.