Table for receiving a workpiece and method for processing a workpiece on such table
US8785812B2 · kind B2 · utility
1Cited by
11References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 27, 2005 |
| Grant date | Jul 22, 2014 |
| Priority date | — |
| Expiry date | Jul 8, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T225/371
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a device for the treatment of a workpiece, in particular of a substantially flat substrate, comprising a table (2) for supporting the workpiece (5), a flow generation apparatus (6, 11) producing a gas flow (22) on a top face (17.1, 17.2) of the table (2) in a region between the workpiece (5) and the top face (17.1, 17.2) of the table (2), on which gas flow the workpiece (5) is supported during the treatment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.