Use of an optical device for interferometric analysis of the surface condition of an object
US8792104B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 29, 2009 |
| Grant date | Jul 29, 2014 |
| Priority date | — |
| Expiry date | May 14, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/262
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The instant disclosure describes an optical device for the interferometric analysis of the surface condition of an object, including: a light source; an optical fiber capable of receiving the incident light wave and transmitting said wave to the object; a detector capable of detecting a combination between a light wave reflected by the optical fiber and a light wave returned by the object; and in which the optical fiber has a free end in the shape of a cone, with a vertex angle of between 15 and 25 degrees, the tip of the cone having dimensions of less than 50×50 nm, and the tip of the cone being placed, while in use, at a distance of between 5 and 50 μm from the surface of the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.