Systems and methods for airborne particle contamination control
US8793105B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2011 |
| Grant date | Jul 29, 2014 |
| Priority date | — |
| Expiry date | Feb 5, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B30/70
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a method for airborne particle contamination control, comprising: creating a simulation by modeling a turbulent airflow in an environment that includes an equipment of interest; plotting a flow parameter on the simulation to visualize a flow field of air according to a current design; creating an injection point on the simulation for particles in the environment; determining a particle concentration of the particles; determining, by a computing device and from the particle concentration, whether the current design provides contamination control; in response to determining that the current design does not provide contamination control, creating a modified design; and providing the modified design for implementation. The present invention further relates to a computing device for airborne particle contamination control. The present invention still further relates to a non-transitory computer-readable medium for airborne particle contamination control.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.