Patent · US Active

Micromechanical Coriolis rate of rotation sensor

US8794066B2 · kind B2 · utility

3Cited by

4References

20Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Peter Merz · Hanerau-Hademarschen, DE
Manfred Weiss · Bad Liebenzell, DE

Key dates

Filing date	Nov 11, 2009
Grant date	Aug 5, 2014
Priority date	—
Expiry date	Jan 18, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5755
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to a micromechanical Coriolis rate of rotation sensor for detecting rates of rotation with components around measuring axes in three spatial directions which are orthogonal to one another. The Coriolis rate of rotation sensor has a substrate, a detection mass and at least two drive masses, wherein the drive masses can each be driven to perform a primary movement relative to the substrate. The direction of the primary movement of one of the at least two drive masses is perpendicular to the direction of the primary movement of another of the at least two drive masses. The detection mass is coupled to the drive masses. The invention also relates to an Inertial Measurement Unit (IMU) and to a method for detecting rates of rotation in three spatial directions which are orthogonal to one another.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.