Patent · US Active

Double-axis rotation rate sensor

US8794067B2 · kind B2 · utility

18Cited by

1References

13Claims

0Family size

Assignee

Continental Teves AG & Co. OHG · DE

Inventors

Bernhard Schmid · Friedberg, DE
Stefan Günthner · Frankfurt am Main, DE
Ramnath Sivaraman · Frankfurt, DE

Key dates

Filing date	Mar 11, 2010
Grant date	Aug 5, 2014
Priority date	—
Expiry date	Feb 5, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/574
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical rotation rate sensor, comprising at least one substrate, wherein the rotation rate sensor has at least a first and a second seismic mass which are coupled to one another by means of at least one coupling beam, and wherein the rotation rate sensor is embodied in such a way that it can detect rotation rates about at least a first and a second sensitive axis, wherein each seismic mass is assigned at least one actuator unit with which the deflection behavior of the seismic mass can be influenced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.