Scanning acoustic microscope with profilometer function
US8794072B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2008 |
| Grant date | Aug 5, 2014 |
| Priority date | — |
| Expiry date | Aug 30, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3511
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning acoustic microscope, includes an ultrasonic transducer, a data storage memory, a display, a scanner assembly, and a controller. The controller is adapted to cause the motor to move the transducer along a path with respect to a sample, and cause the ultrasonic transducer to emit a pulse of acoustic energy towards the sample at each point in a plurality of points along the path. In addition, the controller is adapted to cause the ultrasonic transducer to receive a set of reflection signals that correspond to each of the pulses emitted therefrom. The sets of reflection signals are used to generate an image of a profile of the sample and an image representative of acoustic impedance features in the interior of the sample. The image of the profile of the sample shows a variation in height across a surface of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.