Sensor module and method for producing a sensor module
US8794074B2 · kind B2 · utility
1Cited by
13References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 2, 2009 |
| Grant date | Aug 5, 2014 |
| Priority date | — |
| Expiry date | Nov 20, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor module is provided having a sensor element, a housing and a substrate, the sensor element being situated on the substrate and the sensor element is provided to be at least partially embedded in the housing; and the sensor module further having a compensation element for compensating for thermal deformations of the housing; the housing being essentially situated between the substrate and the compensation element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.