Multilayered NONON membrane in a MEMS sensor
US8794075B2 · kind B2 · utility
1Cited by
4References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 11, 2011 |
| Grant date | Aug 5, 2014 |
| Priority date | — |
| Expiry date | Mar 12, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various embodiments relate to a MEMS pressure sensor including: a lower electrode; a first insulating layer over the lower electrode; a second insulating layer over the first insulating layer that forms a cavity between the first and second insulating layers; an upper electrode over the second insulating layer, wherein a portion of the cavity is between the upper and lower electrodes; and a NONON pressure membrane over the upper electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.