Pressure sensor
US8794077B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 24, 2010 |
| Grant date | Aug 5, 2014 |
| Priority date | — |
| Expiry date | Oct 13, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0042
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor, comprising: a monocrystalline membrane body, which includes a measuring membrane and an edge region surrounding the measuring membrane. The edge region has a greater material thickness than the measuring membrane and the edge region has a first mounting surface, whose surface normal is given by a first principal crystal axis. A monocrystalline substrate, which, with respect to crystal structure, comprises the same semiconductor material as the membrane body, the substrate has a second mounting surface, whose surface normal extends parallel to the first principal crystal axis. The membrane body is tightly connected to the substrate by joining the first mounting surface to the second mounting surface. The orientations of other principal crystal axes of the membrane body and the substrate are, in each case, oriented parallel relative to one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.