Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped groves and sealing lands in a non-contact manner
US8795769B2 · kind B2 · utility
1Cited by
34References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 2, 2006 |
| Grant date | Aug 5, 2014 |
| Priority date | — |
| Expiry date | Aug 6, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P40/57
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus for coating and baking and deposition of surfaces on glass substrate or flexible substrate, such as films and thin glass sheets or other similar work pieces as it transitions thru and between small gaps of aero-static or hydro-static porous media bearings and differentially pumped vacuum grooves, in a non-contact manner, in order to process within a vacuum environment. The process is also intended to incorporate simultaneous and immediately sequential ordering of various processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.