Method for controlling electrical property of passive device during fabrication of integrated component and related integrated component
US8796813B2 · kind B2 · utility
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2References
23Claims
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Key dates
| Filing date | Mar 12, 2013 |
| Grant date | Aug 5, 2014 |
| Priority date | — |
| Expiry date | Mar 12, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for controlling an electrical property of a passive device during a fabrication of an integrated component includes providing a substrate, manufacturing the passive device on the substrate, measuring the electrical property of the passive device to obtain a measuring result, determining at least one layout pattern corresponding to at least one later manufacturing process by the measuring result for adjusting the electrical property of the passive device, and continuing the rest of the fabrication including the at least one later manufacturing process of the integrated component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.