Method for operating a micromirror device with electromechanical pulse width modulation
US8797629B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 4, 2011 |
| Grant date | Aug 5, 2014 |
| Priority date | — |
| Expiry date | Jul 12, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2310/066
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of operating by pulse width modulation a micromirror device is disclosed. In one aspect, the method includes providing a micromirror device having a micromirror element electrostatically deflectable around a rotation axis between a first and second position. The micromirror element is controllable by applying voltage signals to a first and second electrode on one side of the rotation axis and a third and fourth electrode on the other side. The method includes associating an intermediate value of intensity to the micromirror element during a time frame, the intensity being between a first value corresponding to the first position and a second value corresponding to the second position. The method includes switching the micromirror element between the first and second position. The intermediate value corresponds to the ratio of periods in the time frame in which the micromirror element is in the first or second position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.