Fill-in contact layer for slider air bearing surface protective coating
US8797688B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 30, 2012 |
| Grant date | Aug 5, 2014 |
| Priority date | — |
| Expiry date | Nov 30, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/3163
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A magnetic slider for magnetic data recording constructed by a process that allows for careful control of seed layer and overcoat thickness. The slider is treated by a process that result in surface pits and scratches. A refill layer is used to fill in the pits and scratches, the refill layer being constructed of a material that does not include Si or carbon. An angled ion beam etching can be used to remove portions of the refill layer that extend outside of the pits and scratches. Then, a seed layer comprising Si and a protective layer comprising C are deposited over the surface. Because the refill layer does not contain either of Si or C, the thickness of the seed layer and carbon overcoat can be acurately measured and controlled, without the refill layer being mistaken for seed or overcoat material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.