Optical system with integrated photodetector using a self-aligned double U-groove structure
US8798410B2 · kind B2 · utility
5Cited by
9References
26Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 12, 2012 |
| Grant date | Aug 5, 2014 |
| Priority date | — |
| Expiry date | Nov 27, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/4232
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical system includes a silicon substrate, a 45-degree or 54.7-degree reflector formed in the silicon substrate, deeply etched double U-shape trenches formed in the silicon substrate, a thin film disposed on the reflector surface with total or partial optical refection, a top and bottom surface contacted p-i-n structure formed in the silicon substrate for optical power monitoring, a plurality of rectangular or wedge shaped spacers formed on top surface of the silicon substrate, and a surface emitting light source flip-chip bonded on the silicon substrate via the spacers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.