Cryopump control apparatus, cryopump system, and method for monitoring cryopump
US8800304B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 13, 2012 |
| Grant date | Aug 12, 2014 |
| Priority date | — |
| Expiry date | Nov 6, 2032 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B37/08
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A cryopump comprises a cryopanel that cools and thus condenses or adsorbs gas, and a pump housing that contains the cryopanel. a regeneration process of the cryopump includes a basic purge process, an evacuation processes, and an optional purge process that is executed additionally if required. The optional purge process includes one or more gas purge steps. In a cryopump control apparatus that controls the cryopump, a deterioration evaluation unit determines whether a re-purge number, which is the total number of gas purge steps that are required to be executed in one regeneration process, reaches a deterioration evaluation criteria number.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.