Patent · US Active

Method and apparatus for a pressure measuring cell

US8800378B2 · kind B2 · utility

1Cited by

2References

11Claims

0Family size

Assignee

VEGA Grieshaber KG · DE

Inventors

Thomas Kopp · Ludwigsburg, DE
Jörn Jacob · Wolfach, DE
Martin Mellert · Steinach, DE
Josef Fehrenbach · Lenzkirch, DE
Thomas Deck · Wolfach, DE

Key dates

Filing date	Jun 13, 2011
Grant date	Aug 12, 2014
Priority date	—
Expiry date	May 2, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49826
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention is for a method and apparatus for a pressure measuring cell for measuring a metered pressure, with a base body having at least one base body electrode and with a membrane body connected to the base body to form a sensor chamber, which has at least one membrane electrode and can be subjected to the pressure of a medium that is below the measurement pressure, wherein both the wall of the sensor chamber that is formed by the base body and the wall of the sensor chamber that is formed by the membrane body is covered with a protective layer; according to the invention, the protective layer is fashioned as a glass layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.