Time-related temperature variation transducer, electronic chip incorporating this transducer and method of fabrication of this chip

US8801274B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Jean-Francois Mainguet · Grenoble, FR
• Alain Chambron · Saint-Égrève, FR
• Bruno Charrat · Saint-Égrève, FR
• Emmanuel Defay · Saint-Égrève, FR
• Guy Parat · Grenoble, FR

Key dates

• Filing date: May 5, 2011
• Grant date: Aug 12, 2014
• Expiry date: Jun 20, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J5/80
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A transducer for transducing time-related temperature variations into a difference in potentials includes an upper conductive electrode designed to be exposed to a time-related temperature variation to be measured, a lower conductive electrode, and at least one layer of pyroelectric material based on a III-V nitride directly interposed between the upper and lower conductive electrodes to generate, between the upper and lower conductive electrodes, a difference in potentials corresponding to the temperature variation even in the absence of external mechanical stress.