Nanomembrane structures having mixed crystalline orientations and compositions
US8803195B2 · kind B2 · utility
0Cited by
9References
17Claims
0Family size
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Key dates
| Filing date | Mar 10, 2008 |
| Grant date | Aug 12, 2014 |
| Priority date | — |
| Expiry date | May 7, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02639
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present nanomembrane structures include a multilayer film comprising a single-crystalline layer of semiconductor material disposed between two other single-crystalline layers of semiconductor material. A plurality of holes extending through the nanomembrane are at least partially, and preferably entirely, filled with a filler material which is also a semiconductor, but which differs from the nanomembrane semiconductor materials in composition, crystal orientation, or both.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.