Door valve
US8807527B2 · kind B2 · utility
4Cited by
1References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 21, 2010 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | Jun 21, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8225
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An up and down operating actuator unit which manages upward and downward motions of an opening and closing member, and a forward and backward actuator unit which manages forward and backward motions of the opening and closing member are configured so that the opening and closing member, which opens and closes a wafer movement path, can be accurately operated in an “L”-shaped motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.