Patent · US Active

Method for deposition of at least one electrically conducting film on a substrate

US8809192B2 · kind B2 · utility

33Cited by
3References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 11, 2010
Grant dateAug 19, 2014
Priority date
Expiry dateOct 23, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K71/162
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

A method for deposition of at least one electrically conducting film on a substrate, wherein the method includes the steps of: selecting a layer of a film material, wherein the layer includes a mask on a front side, and wherein the layer and the mask are one piece; positioning the front side of the layer upon the substrate; applying at least one laser pulse onto a back side of the layer, so as to melt and to vaporize at least parts of the layer such that melt droplets are propelled toward and deposited upon the substrate; and forming the film, wherein at least one slot of the mask limits the distribution of the melt droplets.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.