Method for deposition of at least one electrically conducting film on a substrate
US8809192B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2010 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | Oct 23, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/162
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method for deposition of at least one electrically conducting film on a substrate, wherein the method includes the steps of: selecting a layer of a film material, wherein the layer includes a mask on a front side, and wherein the layer and the mask are one piece; positioning the front side of the layer upon the substrate; applying at least one laser pulse onto a back side of the layer, so as to melt and to vaporize at least parts of the layer such that melt droplets are propelled toward and deposited upon the substrate; and forming the film, wherein at least one slot of the mask limits the distribution of the melt droplets.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.