Process and apparatus for ablation
US8809732B2 · kind B2 · utility
5Cited by
9References
9Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Dec 19, 2012 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | Dec 19, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/146
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An ablation method including a steps of ablating a region of a substrate (1) by a laser beam (3); and removing debris ablated from the region (1) by a flow of a fluid (7), namely, a gas or vapor, a liquid or a combination of the fluids. The flow of fluid (7) is directed to flow over the region so as to entrap debris and thereafter remove the entrapped debris from the region by directing the flow of fluid, with any entrapped debris, away from region along a predetermined path (6) avoiding subsequent deposition of entrapped debris on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.