Apparatus for producing trichlorosilane and method for producing trichlorosilane
US8809746B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 3, 2011 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | Apr 26, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/00155
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An apparatus for producing trichlorosilane, comprising: a reaction chamber into which the raw gas is introduced to produce a reaction gas; a plurality of heaters disposed inside the reaction chamber to heat the raw gas; and a plurality of electrodes connected to basal portions of the heaters, wherein the heaters include first heaters each having an exothermic portion and second heaters each having an exothermic portion shorter than that of the first heater and a radiation plate connected to the exothermic portion, wherein a partial portion of the exothermic portion of the first heater faces the radiation plate of the second heaters; the reaction chamber has an introducing port of the raw gas on a side of the exothermic portion of the second heater; and the reaction chamber has discharge port of the reaction product gas on a side of the radiation plate of the second heater is arranged.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.