High spatial resolution non-contact temperature measurement
US8809783B2 · kind B2 · utility
2Cited by
4References
20Claims
0Family size
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Key dates
| Filing date | Jun 18, 2013 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | Jun 18, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2804
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems, methods, and computer-readable media for temperature measurement of a sample, using new temperature measurement and mapping techniques, are provided. The technique employs a temperature sensitive electron signal in a scanning electron microscope (SEM) and provides both high spatial resolution and non-contact temperature measurement capabilities. An electron beam of the SEM can be initiated to interact with a sample, and a temperature sensitive signal can be collected from the sample and analyzed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.