Microbolometer detector with centrally-located support structure
US8809786B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 1, 2012 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | Dec 7, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/202
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microbolometer detector has an improved support structure. The microbolometer detector includes a substrate and a support structure including at least one post connected to and projecting substantially vertically from the substrate. The microbolometer detector also includes a platform held above the substrate and including a central region substantially vertically aligned with the at least one post of the support structure and a peripheral region surrounding the central region, the platform being supported by the support structure from the central region thereof. The microbolometer further includes at least one thermistor located in the peripheral region of the platform. A microbolometer focal plane array may also include multiple microbolometer detectors arranged in a two-dimensional array. The support structures are particularly well suited for supporting relatively large platforms of microbolometer detectors, particularly for far-infrared and terahertz detection and spectroscopy applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.