Vertical metal insulator metal capacitor
US8810002B2 · kind B2 · utility
9Cited by
44References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2010 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | May 22, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A capacitor includes a first electrode. The first electrode includes a bottom conductive plane and a plurality of first vertical conductive structures. The bottom conductive plane is disposed over a substrate. The capacitor includes a second electrode. The second electrode includes a top conductive plane and a plurality of second vertical conductive structures. The capacitor includes an insulating structure between the first electrode and the second electrode. The first vertical conductive structures and the second vertical conductive structures are interlaced with each other thereby providing higher capacitance density.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.