Micro-mechanical component with cantilever integrated electrical functional element

US8810110B2 · kind B2 · utility

Assignee

• NanoWorld AG · CH

Inventors

• Thomas Sulzbach · Cologne, DE
• Wolfgang Engl · Erlangen, DE
• Christoph Richter · Berlin, DE

Key dates

• Filing date: Mar 13, 2012
• Grant date: Aug 19, 2014
• Expiry date: Apr 17, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2291/0427
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micro-mechanical component including a support element and a cantilever with integrated electrical functional element to which at least two electrical supply lines implemented as printed conductors on the cantilever are routed. The invention proposes to arrange at least one each of the supply lines on the two opposite flat surfaces of the cantilever and/or the support element. The functional element is supplied by the first supply line on a first flat surface, with the second supply line on the opposite flat surface serving as return line.