EUV mirror module with a nickel electroformed curved mirror
US8810775B2 · kind B2 · utility
4Cited by
8References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 16, 2010 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | Aug 10, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7015
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An EUV mirror module is disclosed that comprises a substrate with a curved upper surface and a curved electroformed mirror. A self-adjusting bonding material is disposed between the substrate and the electroformed mirror. The bonding material is flowable at a melting temperature and self-adjusts to conformally fill the region between substrate to the electroformed mirror and bond the substrate and the electroformed mirror. The substrate may have at least one cooling channel for cooling the mirror module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.