Gimbaled scanning micro-mirror apparatus
US8810879B2 · kind B2 · utility
2Cited by
10References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 2, 2010 |
| Grant date | Aug 19, 2014 |
| Priority date | — |
| Expiry date | Oct 25, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided is a Micro-Electro-Mechanical Systems (MEMS) device for actuating a gimbaled element, the device including a symmetric electromagnetic actuator for actuating one degree of freedom (DOF) and a symmetric electrostatic actuator for actuating the second degree of freedom.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.