Patent · US Active

Micromechanical component and production method for a micromechanical component

US8813573B2 · kind B2 · utility

0Cited by

4References

10Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Frederic Njikam Njimonzie · Reutlingen, DE
Wolfram Schock · Reutlingen, DE
Joerg Muchow · Reutlingen, DE
Zoltan Lestyan · Martonvásár, HU

Key dates

Filing date	May 18, 2010
Grant date	Aug 26, 2014
Priority date	—
Expiry date	Apr 19, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/42
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A micromechanical component includes: an adjustable element connected to a holder at least via a spring; a first sensor device with at least one first piezo-resistive sensor element, which first sensor device provides a first sensor signal relating to a first mechanical stress, the first piezo-resistive sensor element being situated on or in an anchoring region of the spring; and a second sensor device with at least one second piezo-resistive sensor element, which second sensor device provides a second sensor signal relating to a second mechanical stress, the second piezo-resistive sensor element being situated on or in an anchoring region of the spring.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.