Crucible structure for plasma light source and manufacturing method
US8814620B2 · kind B2 · utility
2Cited by
4References
24Claims
0Family size
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Key dates
| Filing date | Sep 19, 2012 |
| Grant date | Aug 26, 2014 |
| Priority date | — |
| Expiry date | Sep 19, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J65/044
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Operation to produce an intermediate product for a crucible for a LUWPL is as follows:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.