Apparatuses for fabricating patterns using laser diode
US8816249B2 · kind B2 · utility
0Cited by
8References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2011 |
| Grant date | Aug 26, 2014 |
| Priority date | — |
| Expiry date | Apr 3, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/0235
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for fabricating patterns using a laser diode is presented. The apparatus includes at least one laser diode, at least one lens and a mask having at least one pin hole, wherein light emitted from the laser diode is emitted through the lens and the pin hole to be focused on a first material layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.