Patent · US Active

Ultraprecision non-contact three-dimensional probing system based on spherical capacitive plate

US8816702B2 · kind B2 · utility

2Cited by

8References

12Claims

0Family size

Assignee

HARBIN INSTITUTE OF TECHNOLOGY · CN

Inventors

Jiubin Tan · Jingwei, CN
Junning Cui · Jingwei, CN
Jiwen Cui · Jingwei, CN

Key dates

Filing date	Jan 18, 2010
Grant date	Aug 26, 2014
Priority date	—
Expiry date	Jan 19, 2031

Classification

Technology area (CPC G)Physics
CPC primaryG01B7/012
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A non-contact three-dimensional probing system based on a spherical capacitive plate has a probe including a spherical probing head (5), a stylus pipe (6), an active shielding pipe (8), a signal conducting rod (7), an insulating element (9), a stylus holder (10) and a probe body (11). The spherical probing head (5) is mounted at one end of the insulating element (9), and it has a spherical capacitive plate over its surface. The capacitive signal coming from the spherical capacitive plate is outputted through the signal conducting rod (7). The active shielding pipe (8) is driven by the signal converting and processing circuit (13) of the probing system to maintain equipotential with the signal conducting rod (7), and so the influence of parasitic capacitance and spatial electromagnetic interference can be eliminated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.